Determination of Trace Impurities on Silicon-Wafer Surface by Isotope Dilution Analysis Using Electrothermal Vaporization/Inductively Coupled Plasma Mass Spectrometry

スポンサーリンク

概要

• 論文の詳細を見る
• 1996-02-10

著者

• Chiba Koichi

  Advanced Materials & Technology Research Labs. Nippon Steel Corp.

• Uchida H

  Kyushu Univ. Fukuoka Jpn

• KOMODA Mitsunori

  Advanced Materials & Technology Research Labs., Nippon Steel Corp.

• UCHIDA Hiroshi

  Kanagawa Industrial Research Institute

• Komoda Mitsunori

  Advanced Materials & Technology Research Labs. Nippon Steel Corp.

関連論文

• Genetic Alterations of Mixed Hyperplastic Adenomatous Polyps in the Colon and Rectum
• Determination of Trace Impurities on Silicon-Wafer Surface by Isotope Dilution Analysis Using Electrothermal Vaporization/Inductively Coupled Plasma Mass Spectrometry
• Analytical Characteristics of Inductively Coupled Oxygen-Plasma Mass Spectrometry Assisted by Adding Argon to the Outer Gas

スポンサーリンク