An Investigation of a Unit-Machined Shape for the Three-Dimensional Micromachining of Silicon Surfaces with a Pulsed Ultraviolet Laser

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概要

• 論文の詳細を見る
• 1998-03-31

著者

• NAMBA Yoshiharu

  Department of Mechanical Engineering, Chubu University

• Namba Yoshiharu

  Department Of Mechanical Engineering Chubu University

• He Liming

  Department Of Mechanical Engineering Chubu University

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• An Investigation of a Unit-Machined Shape for the Three-Dimensional Micromachining of Silicon Surfaces with a Pulsed Ultraviolet Laser

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