Fabrication of Ceramic Microstructures by Micro Photoforming
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概要
- 論文の詳細を見る
- 1997-06-30
著者
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Yanagisawa K
Microsystems Group Research Department Olympus Optical Co. Ltd.
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SHAN Xuechuan
Microsystems Group, Research Department, Olympus Optical Co. Ltd.
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YANAGISAWA Kazuhisa
Microsystems Group, Research Department, Olympus Optical Co. Ltd.
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Shan Xuechuan
Microsystems Group Research Department Olympus Optical Co. Ltd.
関連論文
- Monolithic Fabrication of Flexible Film and Thinned Integrated Circuits (特集:MEMS技術)
- Fabrication of Ceramic Microstructures by Micro Photoforming