スポンサーリンク
Tohoku University, Dept. of Nanomechanics | 論文
- Micro-Heater Array for Tunable Fiber-Bragg Grating
- Piezoresistive Rotation Angle Sensor Integrated in Micromirror
- Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror