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Technology Platform Research Center Seiko Epson Cooperation | 論文
- High Performance P-Channel Single-Crystalline Si TFTs Fabricated Inside a Location-Controlled Grain by μ-Czochralski Process(Electronic Displays)
- High-Quality SiO_2/Si Interface Formation and Its Application to Fabrication of Low-Temperature-Processed Polycrystalline Si Thin-Film Transistor(Semiconductors)
- Applications of Pulsed Excimer Laser Deposition with a Frozen Nitrogen Target to Deposition of NbN and BN Films
- Formation of a Frozen Nitrogen Target and Characterization for the Application of Pulsed Laser Deposition