スポンサーリンク
Sasebo National College of Technology, Sasebo, Nagasaki 857-1193, Japan | 論文
- Plasma Processing of Functional Thin Films by Sputtering Deposition Using Metal-Based Powder Target
- Plasma Processing of Functional Thin Films by Sputtering Deposition Using Metal-Based Powder Target (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)