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Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST) | 論文
- Maskless Lithographic Fine Patterning on Deeply Etched or Slanted Surfaces, and Grayscale Lithography, Using Newly Developed Digital Mirror Device Lithography Equipment
- High-efficient Chip to Wafer Self-alignment and Bonding for Flexible and Size-free MEMS-IC Integration
- Property Variation of Ni--W Electroformed Mold for Micro-Press Molding