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Osaka University Joining and Welding Research Institute | 論文
- Large-Area and High-Speed Deposition of Microcrystalline Silicon Film by Inductive Coupled Plasma using Internal Low-Inductance Antenna
- Effects of Antenna Size and Configurations in Large-Area RF Plasma Production with Internal Low-Inductance Antenna Units
- プラズマアークによるアルミニウム厚板のキーホール溶接の数値シミュレーション