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Department of Nanomechanics Engineering, Tohoku University | 論文
- Micro-Heater Array for Tunable Fiber-Bragg Grating
- Technique for Preparing Defect-free Spray Coated Resist Film on Three-Dimensional Micro-Electromechanical Systems
- Flow Condition in Resist Spray Coating and Patterning Performance for Three-Dimensional Photolithography over Deep Structures
- Heating Effect on Photoresist in Spray Coating Technique for Three-Dimensional Lithography
- Heating Effect on Photoresist in Spray Coating Technique for Three-Dimensional Lithography