スポンサーリンク
Department of Molecular Design and Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya 464-8603, Japan | 論文
- Thermal Desorption Behavior of AlF3 Formed on Al2O3
- Identification of Desorption Products from the Thermal Reaction of AlN with XeF2 Vapor Using Molecular Beam Mass Spectrometry and a Time-of-Flight Technique