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Department of Mechanical Engineering, Kyushu University, Fukuoka 819-0395, Japan | 論文
- Magnetic Micro Actuator Using Interactive Force between Magnetic Elements
- Effects of Resist Thickness and Viscoelasticity on the Cavity Filling Capability in Bilayer Thermal Embossing
- Performance Evaluation Method of Chemical Mechanical Polishing Pad Conditioner Using Digital Image Correlation Processing
- Effect of Groove Pattern of Chemical Mechanical Polishing Pad on Slurry Flow Behavior