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Department of Electrical Engineering and Computer Science, School of Engineering, Nagoya University | 論文
- High-Z Dust Generation on Tungsten Surfaces due to Synergetic Erosion of Deuterium/Helium Plasma Exposures
- Growth and Energy Bandgap Formation of Silicon Nitride Films in Radical Nitridation
- Fabrication of Carbon Nanowalls Using Novel Plasma Processing
- Suppression of Oxygen Impurity Incorporation into Silicon Films Prepared from Surface-Wave Excited H_2/SiH_4 Plasma