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Department of Applied Chemistry and Bioengineering, Graduate School of Engineering, Osaka City University | 論文
- Parametric Study on the Physical Action of Steam--Water Mixture Jet: Removal of Photoresist Film from Silicon Wafer Surfaces
- Repeated Cooling Crystallization for Production of Microcrystals with a Narrow Size Distribution
- Development of Multilayer Resist Technology for Halftone Mask in Liquid Crystal Display Manufacturing
- Crystallization Behavior of Ibuprofen under Microwave Irradiation
- Scanning Removal of Ion-implanted Novolak Resist by using a Laser Irradiation