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Department Of Chemistry School Of Molecular Science (bk21) And Center For Advanced Functional Polyme | 論文
- Poly(isobornyl methacrylate-co-3-(t-butoxycarbonyl)-1-vinyl-2-caprolactam) for an Environmentally Stable Chemically Amplified Resist
- Adhesion Enhancement of Norbornene Polymers with Lithocholate Substituents for 193-nm Resists