Tsuda Hiroshi | Graduate School of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japan
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- Graduate School of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japanの論文著者
Graduate School of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japan | 論文
- Cantilever Fabrication by Force-Free Release Transfer
- Sheath Voltage Estimation for Inductively Coupled Plasma Etcher by Impedance Analysis
- Effects of Mold Side Wall Profile on Demolding Characteristics
- Fabrication of Cantilevers by Two-Step Transfer Process without Lithography
- Evaluation of Template Release Energy with Use of Fluorinated Segregation Agents for UV Nanoimprint Resists