Yasuhara Shigeo | Institute of Fluid Science, Tohoku University, Sendai 980-8577, Japan

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概要

• 同名の論文著者
• Institute of Fluid Science, Tohoku University, Sendai 980-8577, Japanの論文著者

関連著者

• Samukawa Seiji

  Institute Of Fluid Science Tohoku University

• Wada Akira

  Institute Of Fluid Science Tohoku University

• Sasaki Toru

  Institute Of Fluid Science Tohoku University

• Yasuhara Shigeo

  Institute of Fluid Science, Tohoku University, Sendai 980-8577, Japan

著作論文

• Super-Low-k SiOCH Film with Sufficient Film Modulus and High Thermal Stability Formed by Using Admixture Precursor in Neutral-Beam-Enhanced Chemical Vapor Deposition (Special Issue : Advanced Metallization for ULSI Applications)

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