Hirai Yoshihiko | Japan Science and Technology Agency (JST), Core Research Evolutional Science and Technology (CREST), Chiyoda, Tokyo 102-0075, Japan

スポンサーリンク

概要

関連著者

Sato Yuko
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
NAKAGAWA Masaru
Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University
Kubo Shoichi
Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, Sendai 980-8577, Japan
Hirai Yoshihiko
Japan Science and Technology Agency (JST), Core Research Evolutional Science and Technology (CREST), Chiyoda, Tokyo 102-0075, Japan

著作論文

Resist pattern inspection using fluorescent dye-doped polystyrene thin films in reactive-monolayer-assisted thermal nanoimprint lithography (Special issue: Microprocesses and nanotechnology)

スポンサーリンク