OKAMOTO Akio | Nippon Telegraph and Telephone Public Corp., Musashino Electrical Communication Laboratory
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概要
- 同名の論文著者
- Nippon Telegraph and Telephone Public Corp., Musashino Electrical Communication Laboratoryの論文著者
Nippon Telegraph and Telephone Public Corp., Musashino Electrical Communication Laboratory | 論文
- in situ Phosphorus-Doped Silicon Film Depositions by Magnetron Sputtering in Phosphorus Vapor
- Effect of Mixing Hydrogen-Argon on Magnetron Sputtered SiO_2 Films