Ikegami Naokatsu | VLSI R&D Center, Electronic Devices Group, Oki Electric Industry Co., Ltd
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- IKEGAMI Naokatsuの詳細を見る
- 同名の論文著者
- VLSI R&D Center, Electronic Devices Group, Oki Electric Industry Co., Ltdの論文著者
VLSI R&D Center, Electronic Devices Group, Oki Electric Industry Co., Ltd | 論文
- Vertical Profile Control in Ultrahigh-Aspect-Ratio Contact Hole Etching with 0.05-µm-Diameter Range
- Characteristics of Very High-Aspect-Ratio Contact Hole Etching