Mizutani Uichiro | Department of Crystalline Materials Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

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概要

• Mizutani Uichiroの詳細を見る
• 同名の論文著者
• Department of Crystalline Materials Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japanの論文著者

関連著者

• SEKIGUCHI Atsushi

  ANELVA Corporation

• YANAGI Yousuke

  IMRA Material R & D Co Ltd.

• ITOH Yoshitaka

  IMRA Material R & D Co Ltd.

• Ikuta Hiroshi

  Department Of Applied Physics The University Of Tokyo

• Imai Atsuo

  Nagoya Industrial Science Research Institute

• HAZAMA Hirofumi

  Nagoya Industrial Science Research Institute

• MATSUDA Takashi

  DIAX Co., Ltd.

• SAKURAI Kazuo

  ANELVA CORP.

• Mizutani Uichiro

  Department Of Crystalline Materials Science Nagoya University

• Ikuta Hiroshi

  Department of Crystalline Materials Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

• Hazama Hirofumi

  Nagoya Industrial Science Research Institute, Anagahora 2271-130, Shimoshidami, Moriyama-ku, Nagoya 463-0003, Japan

• Itoh Yoshitaka

  IMRA MATERIAL R&D Co., Ltd., Hachiken-cho 5-50, Kariya 448-0021, Japan

• Imai Atsuo

  Nagoya Industrial Science Research Institute, Anagahora 2271-130, Shimoshidami, Moriyama-ku, Nagoya 463-0003, Japan

• Sekiguchi Atsushi

  ANELVA CORP., Yotsuya 5-8-1, Fuchu 183-8508, Japan

• Yanagi Yousuke

  IMRA MATERIAL R&D Co., Ltd., Hachiken-cho 5-50, Kariya 448-0021, Japan

• Sakurai Kazuo

  ANELVA CORP., Yotsuya 5-8-1, Fuchu 183-8508, Japan

• Mizutani Uichiro

  Department of Crystalline Materials Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

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著作論文

• Bottom Coverage of Cu Deposit for 200-nm-Class Circular Vias with High Aspect Ratios Investigated by Magnetron Sputtering Activated Using Superconducting Bulk Magnet

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