Watanabe Toshinari | Semiconductor Leading Edge Technologies, Inc., 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan

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概要

関連著者

Watanabe Toshinari
Semiconductor Leading Edge Technol. Inc. Ibaraki Jpn
Eimori Takahisa
Semiconductor Leading Edge Technologies Inc.
Matsuki Takeo
Semiconductor Leading Edge Technologies Inc. (selete)
Nara Yasuo
Semiconductor Leading Edge Technologies Inc.
Mise Nobuyuki
Semiconductor Leading Edge Technologies, Inc., 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
Morooka Tetsu
Semiconductor Leading Edge Technologies, Inc., 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
Watanabe Toshinari
Semiconductor Leading Edge Technologies, Inc., 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan

著作論文

Suppression of Metamorphoses of Metal/High-$k$ Gate Stack by Low-Temperature, Cl-Free SiN Offset Spacer, and Its Impact on Scaled Metal–Oxide–Semiconductor Field-Effect Transistors

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