桑野 博喜 | Department of Nanomechanics, Graduate school of Engineering, Tohoku University

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概要

• 同名の論文著者
• Department of Nanomechanics, Graduate school of Engineering, Tohoku Universityの論文著者

Department of Nanomechanics, Graduate school of Engineering, Tohoku University | 論文

• A high-resolution endoscope of small diameter using electromagnetically vibration of single fiber (特集 医療用MEMSデバイス)
• Preparation of Thin Lithium Niobate Layer on Silicon Wafer for Wafer-level Integration of Acoustic Devices and LSI
• Application of Screen-Printed Catalytic E1ectrodes to MEMS-Based Fuel Cells (特集:燃料電池を支えるMEMS/NEMS技術)
• Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS : Separation Method of Glass Layer
• Micro-Nano Electro Mechanical Systems

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