HAYASHI Takuo | Department of Mechanical Engineering, Faculty of Engineering Science, Osaka University
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- Department of Mechanical Engineering, Faculty of Engineering Science, Osaka Universityの論文著者
Department of Mechanical Engineering, Faculty of Engineering Science, Osaka University | 論文
- Diagnostic Experiment and Kinetic Model Analysis of Microwave CH_4/H_2 Plasmas for Deposition of Diamond like Carbon Films
- Plasma Generation by Resonant-Cavity Microwave Discharge and Its Applications for Material Processing
- X-ray Photoelectron Spectroscopy Study of the Interactions of O^+ and N^+ Ions with Polyimide Films
- Long Electron Cyclotron Resonance Plasma Source for Reactive Sputtering
- Plasma Generation and Beam Extraction on Reentrant-Cavity-Type Electron Cyclotron Resonance Ion Source