Sano Yasuhisa | Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

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概要

関連著者

SANO Yasuhisa
Department of Precision Science and Technology, Graduate School of Engineering, University of Osaka
Arima Kenta
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
Mimura Hidekazu
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
Okamoto Takeshi
Department Of Cardiovascular Surgery Niigata City General Hospital
Hara Hideyuki
Department Of Electro Photo Optics Faculty Of Engineering Tokai University
Yamauchi Kazuto
Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
Kubota Akihisa
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
Yagi Keita
Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
Murata Junji
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
Kubota Akihisa
Department of Mechanical Engineering and Materials Science, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan
Hara Hideyuki
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
Sano Yasuhisa
Department of Applied Physics, Tokyo Institute of Technology
Sano Yasuhisa
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

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著作論文

Defect-Free Planarization of 4H–SiC(0001) Substrate Using Reference Plate

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