Itoh Hitoshi | Technology Development Center, Tokyo Electron Ltd., Tsukuba, Ibaraki 305-0841, Japan
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- 同名の論文著者
- Technology Development Center, Tokyo Electron Ltd., Tsukuba, Ibaraki 305-0841, Japanの論文著者
Technology Development Center, Tokyo Electron Ltd., Tsukuba, Ibaraki 305-0841, Japan | 論文
- High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System
- High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)