スポンサーリンク
Technology Development Center, Tokyo Electron Ltd., Tsukuba, Ibaraki 305-0841, Japan | 論文
- High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System
- High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)