Park Jin-Goo | Department of Materials Engineering, Ansan, Gyeonggi 426-791, Korea
スポンサーリンク
概要
関連著者
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Park Jin-Goo
Department of Bio-Nano Technology and Micro Biochip Center, Hanyang University, Ansan 426-791, Korea
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Cho Byoung-Jun
Bio-Nano Technology, Hanyang University, Ansan, Gyeonggi 426-791, Korea
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Park Jin-Goo
Department of Materials Engineering, Ansan, Gyeonggi 426-791, Korea
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Ramachandran Manivannan
Department of Materials Engineering, Ansan, Gyeonggi 426-791, Korea
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Kwon Tae-Young
Department of Materials Engineering, Ansan, Gyeonggi 426-791, Korea
著作論文
- Hybrid Cleaning Technology for Enhanced Post-Cu/Low-Dielectric Constant Chemical Mechanical Planarization Cleaning Performance
- Hybrid Cleaning Technology for Enhanced Post-Cu/Low-Dielectric Constant Chemical Mechanical Planarization Cleaning Performance (Special Issue : Advanced Metallization for ULSI Applications)