Kokaze Yutaka | Institute of Semiconductor and Electronics Technologies, ULVAC, Inc., Susono, Shizuoka 410-1231, Japan

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• Kokaze Yutakaの詳細を見る
• 同名の論文著者
• Institute of Semiconductor and Electronics Technologies, ULVAC, Inc., Susono, Shizuoka 410-1231, Japanの論文著者

Institute of Semiconductor and Electronics Technologies, ULVAC, Inc., Susono, Shizuoka 410-1231, Japan | 論文

• Performance of Integrated Cu Gap-Filling Process with Chemical Vapor Deposition Cobalt Liner (Special Issue : Advanced Metallization for ULSI Applications)
• Improved step coverage of Cu seed layers by magnetic-field-assisted lonized sputtering (Special issue: Advanced metallization for ULSI applications)

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