Kim Changreol | Hynix Semiconductor Inc., Cheongju 361-725, Republic of Korea
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概要
関連著者
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Lee Junhwan
Department of Electrical Engineering, Pohang University of Science and Technology, Pohang, Gyeongbuk 790-784, Republic of Korea
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Kim Changreol
Hynix Semiconductor Inc., Cheongju 361-725, Republic of Korea
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Kim Ohyun
Department Of Electrical And Electronic Engineering
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Lee Sangheon
Department of Electrical Engineering, Pohang University of Science and Technology, Pohang, Gyeongbuk 790-784, Republic of Korea
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Junhwan Lee
Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang 790-784, Republic of Korea
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Song Kangyoo
Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang 790-784, Republic of Korea
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Yongdae Kim
Hynix Semiconductor Inc., Cheongju 361-725, Republic of Korea
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Ohyun Kim
Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang 790-784, Republic of Korea
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Kim Yongdae
Hynix Semiconductor Inc., Cheongju 361-725, Republic of Korea
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Kim Sangpyo
Hynix Semiconductor Inc., Cheongju 361-725, Republic of Korea
著作論文
- A Study of Flare Variation in Extreme Ultraviolet Lithography for Sub-22 nm Line and Space Pattern
- Optimized Multigrid Strategy for Accurate Flare Modeling with Three-Dimensional Mask Effect in Extreme-Ultraviolet Lithography