Kasahara Yu | Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan
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概要
- Kasahara Yuの詳細を見る
- 同名の論文著者
- Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japanの論文著者
関連著者
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Habuka Hitoshi
Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan
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Kasahara Yu
Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan
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Miura Yutaka
Department Of Agricultural Chemistry Faculty Of Agriculture The University Of Tokyo
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Fukae Katsuya
New Products Development Division, Kanto Denka Kogyo Co., Ltd., 1-2-1 Marunouchi, Chiyoda, Tokyo 100-0005, Japan
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Miura Yutaka
Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan
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Hara Akiko
Department of Chemical and Energy Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan
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Takechi Naoto
New Products Development Division, Kanto Denka Kogyo Co., Ltd., 1-2-1 Marunouchi, Chiyoda, Tokyo 100-0005, Japan
著作論文
- Etching Rate of Silicon Dioxide Using Chlorine Trifluoride Gas
- Heat Transport and Temperature Gradient in Silicon-on-Insulator Wafer during Flash Lamp Annealing Process