Matsumoto Kei | Research and Development Department, Komatsu Electronic Metals Co., Ltd.
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Research and Development Department, Komatsu Electronic Metals Co., Ltd. | 論文
- Electrical Activity of Defects Induced by Oxygen Precipitation in Czochralski-Grown Silicon Wafers
- Electrical Activity of Defects Induced by Oxygen Precipitation in Czochralski-Grown Silicon Wafers