Shimogaki Yukihiro | Department of Material Engineering, The University of Tokyo, Bunkyo, Tokyo 163-8656, Japan
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- Department of Material Engineering, The University of Tokyo, Bunkyo, Tokyo 163-8656, Japanの論文著者
Department of Material Engineering, The University of Tokyo, Bunkyo, Tokyo 163-8656, Japan | 論文
- Deposition of Cu-Ag Alloy Film by Supercritical Fluid Deposition
- Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition
- Atomic Layer Deposited Co(W) Film as a Single-Layered Barrier/Liner for Next-Generation Cu-Interconnects
- Surface Modification of SiO2 Microchannels with Biocompatible Polymer Using Supercritical Carbon Dioxide
- In Situ Observation of Initial Nucleation and Growth of Chemical Vapor Deposition of Copper by Surface Reflectivity Measurement