YAMAMOTO Masashi | Musashi Works, Hitachi, Ltd.
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概要
Musashi Works, Hitachi, Ltd. | 論文
- Stitching Error Analysis in an Electron Beam Lithography System: Column Vibration Effect
- The Requirements for Future Elcetron-Beam Reticle Fabrication Systems from an Error Analysis Viewpoint
- Error Analysis in Electron Beam Lithography System : Thermal Effects on Positioning Accuracy
- Measurement of Thermal Radiative Properties of Silicon Wafers with Oxide Film and Nitride Film at 950℃
- Formation of a Stacking Fault-Free Region in Thermally Oxidized Silicon