NAKAMURA Kazuyo | VLSI Development Laboratories, IC Group, Sharp Corporation

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概要

• 同名の論文著者
• VLSI Development Laboratories, IC Group, Sharp Corporationの論文著者

VLSI Development Laboratories, IC Group, Sharp Corporation | 論文

• In Situ Rapid Thermal Nitridation of Collimated Titanium by Physical Vapor Deposition as a Blanket Tungsten Barrier
• High-Temperature Etching of PZT/Pt/TiN Structure by High-Density ECR Plasma
• Suppression of Microloading Effect by Low-Temperature SiO_2 Etching
• Charge Dissipation on Chemically Treated Thin Silicon Oxide in Air
• Potentiometry Combined with Atomic Force Microscope

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