Hideaki Tsuchiya | Advanced Device Development Division, NEC Electronics Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan

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概要

関連著者

Yokogawa Shinji
Advanced Device Development Division, NEC Electronics Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
Tsuchiya Hideaki
Advanced Device Development Division, NEC Electronics Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
Hideaki Tsuchiya
Advanced Device Development Division, NEC Electronics Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan

著作論文

Statistical Analysis of Lifetime Distribution of Time-Dependent Dielectric Breakdown in Cu/Low-$k$ Interconnects by Incorporation of Overlay Error Model

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