Kikuchi Akira | Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185, Japan
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- Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185, Japanの論文著者
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185, Japan | 論文
- Tungsten Gate Technology for Quarter-Micron Application
- Highly Anisotropic Etching of Polysilicon by Time-Modulation Bias
- Enhanced Degradation During Static Stressing of a Metal Oxide Semiconductor Field Effect Transistor Embedded in a Circuit
- Fast Electromigration-lifetime Prediction of Al-based Layered Metallization using the Similarity of Resistance Increase Curve