Miyazaki Takeshi | Crestec Corporation, Hachioji, Tokyo 192-0045, Japan
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概要
Crestec Corporation, Hachioji, Tokyo 192-0045, Japan | 論文
- Continuous-Stage-Movement Blankingless Electron-Beam Lithography for Patterned Media Template Fabrication
- 130 kV High-Resolution Electron Beam Lithography System for Sub-10-nm Nanofabrication