Shimizu Shinji | Chair of Precision Engineering, Department of Mechanical Engineering, Faculty of Science and Technology, Sophia University, 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102-8554, Japan
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概要
- Shimizu Shinjiの詳細を見る
- 同名の論文著者
- Chair of Precision Engineering, Department of Mechanical Engineering, Faculty of Science and Technology, Sophia University, 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102-8554, Japanの論文著者
関連著者
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Seta Shoji
Chair of Precision Engineering, Department of Mechanical Engineering, Faculty of Science and Technology, Sophia University, 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102-8554, Japan
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Shimizu Shinji
Chair of Precision Engineering, Department of Mechanical Engineering, Faculty of Science and Technology, Sophia University, 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102-8554, Japan
著作論文
- Mechanism of Microtrench Generation in Etching of Wiring Trench on SiO2 Layer
- Mechanism of Microtrench Generation in Etching of Wiring Trench on SiO2 Layer: Proposal of Simulation Model using High-Pressure Etching Gas