Shinoda Takahiro | Department of Electronics, Information and Communication Engineering, School of Science and Engineering, Waseda University

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概要

関連著者

Ohdomari Iwao
Kagami Memorial Laboratory For Material Science And Technology Waseda University
Ohdomari Iwao
School Of Science And Engineering Waseda University:kagami Memorial Laboratory For Materials Science
SHINADA Takahiro
Department of Electronics, Information and Communication Engineering, School of Science and Engineer
KOYAMA Hikaru
Department of Electronics, Information and Communication Engineering, School of Science and Engineer
HINOSHITA Chie
Department of Electronics, Information and Communication Engineering, School of Science and Engineer
IMAMURA Ken
Department of Electronics, Information and Communication Engineering, School of Science and Engineer
Imamura Ken
Department Of Electronics Information And Communication Engineering School Of Science And Engineerin
Koyama Hikaru
Department Of Electronics Information And Communication Engineering School Of Science And Engineerin
Hinoshita Chie
Department Of Electronics Information And Communication Engineering School Of Science And Engineerin
Shinada T
Department Of Chemistry Nagaoka University Of Technology
Shinoda Takahiro
Department of Electronics, Information and Communication Engineering, School of Science and Engineering, Waseda University

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著作論文

Improvement of Focused Ion-Beam Optics in Single-Ion Implantation for Higher Aiming Precision of One-by-One Doping of Impurity Atoms into Nano-Scale Semiconductor Devices : Instrumentation, Measurement, and Fabrication Technology

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