Shirai Hajime | Department of Functional Materials and Science, Faculty of Engineering, Saitama University, 255 Shimo-Okubo, Saitama 338-8570, Japan

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概要

関連著者

Shirai Hajime
Department Of Functional Materials And Science Faculty Of Engineering Saitama University
HASHIMOTO KOJI
Department of Cardiovascular and Digestive Surgery, Shimane University School of Medicine
Hashimoto Koji
Department of Functional Materials and Science, Faculty of Engineering, Saitama University, 255 Shimo-Okubo, Saitama 338-8570, Japan
Shirai Hajime
Department of Functional Materials and Science, Faculty of Engineering, Saitama University, 255 Shimo-Okubo, Saitama 338-8570, Japan

著作論文

Formation of Si:H:Cl Films at Low Temperatures of 90–140°C by RF Plasma-Enhanced Chemical Vapor Deposition of a SiH2Cl2 and H2 Mixture

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