HAYAMA Hiroshi | the Functional Devices Research Laboratories, NEC Corporation
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概要
the Functional Devices Research Laboratories, NEC Corporation | 論文
- Development of Transparent Alkylsulfonium Salt as a Photoacid Generator for ArF Excimer Laser Lithography(Special Issue on Organic Materials for Optics and Electronics)
- Excimer-Laser-Induced Zone-Melting-Recrystallization of Silicon Thin Films on Large Glass Substrates and Its Application to TFTs(Special Issue on Electronic Displays)