Furukawa Noriyoshi | Precision & Intelligence Laboratory, Tokyo Institute of Technology
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概要
Precision & Intelligence Laboratory, Tokyo Institute of Technology | 論文
- An Active Aerostatic Spindle with an Axial-Positioning Actuator for Machining Ultra-Micro Scale Structures(Precision positioning and control technology)
- Proposal of gain-matched VCSELs with a thermally actuated MEMS structure for wide temperature operations