Narai Akira | Electronics Research Laboratory, KOBE STEEL, LTD.

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• 同名の論文著者
• Electronics Research Laboratory, KOBE STEEL, LTD.の論文著者

Electronics Research Laboratory, KOBE STEEL, LTD. | 論文

• Preparation of Highly Porous Silica Aerogel Thin Film by Supercritical Drying
• Influence of Wafer Material on Defect Generation During Deep Submicron LOCOS Process
• Focused Ion Beam Lithography Using Ladder Silicone Spin-on Glass as a Positive Resist
• The Electron Charging Effects of Plasma on Notch Profile Defects
• Focused Ion Beam Lithography Using Ladder Silicone Spin-On Glass

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