Ohmi Tadahiro | New Industry Creation Hatchery Center, Tohoku University, Aza-Aoba 04, Aramaki, Aoba-ku, Sendai 980-8579, Japan

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• Ohmi Tadahiroの詳細を見る
• 同名の論文著者
• New Industry Creation Hatchery Center, Tohoku University, Aza-Aoba 04, Aramaki, Aoba-ku, Sendai 980-8579, Japanの論文著者

New Industry Creation Hatchery Center, Tohoku University, Aza-Aoba 04, Aramaki, Aoba-ku, Sendai 980-8579, Japan | 論文

• High-Quality Silicon Oxide Film Formed by Diffusion Region Plasma Enhanced Chemical Vapor Deposition and Oxygen Radical Treatment Using Microwave-Excited High-Density Plasma
• A Technology for Reducing Flicker Noise for ULSI Applications

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