Aga Hiroji | Isobe R&D Center, Shin-Estu Handotai Co., Lid.
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概要
Isobe R&D Center, Shin-Estu Handotai Co., Lid. | 論文
- Study of HF Defects in Thin, Bonded Silicon-on-Insulator Dependent on Original Wafers
- Effective KOH Etching Prior to Modified Secco Etching for Analyzing Defects in Thin Bonded Silicon on Insulator (SOI) Wafers
- Effective KOH Etching Prior to Modified Secco Etching for Analyzing Defects in Thin Bonded SOI Wafers
- Contribution of Polished Surface Waviness to Final SOI Thickness Uniformity of Bonded Wafers through PACE Process (Special Issue on SOI Devices and Their Process Technologies)