Denpoh Kazuki | Yamanashi Technology Development Center, Tokyo Electron AT Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japan

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概要

• Denpoh Kazukiの詳細を見る
• 同名の論文著者
• Yamanashi Technology Development Center, Tokyo Electron AT Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japanの論文著者

関連著者

• Shirafuji Tatsuru

  Department Of Electrical Engineering Kyoto University

• Denpoh Kazuki

  Yamanashi Technology Development Center, Tokyo Electron AT Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japan

• Kazuki Denpoh

  Yamanashi Technology Development Center, Tokyo Electron AT Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japan

著作論文

• Modification of Semianalytical Finite Element Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas: Incorporating Ion Density Oscillation at Low Frequency

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