Suganuma Shinji | Department of Quantum Engineering, School of Engineering, Nagoya University
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概要
Department of Quantum Engineering, School of Engineering, Nagoya University | 論文
- Diamond Film Formation by OH Radical Injection from Remote Microwave H_2/H_2O Plasma into Parallel-Plate RF Methanol Plasma
- High-Rate Anisotropic Ablation and Deposition of Polytetrafluoroethylene Using Synchrotron Radiation Process
- Synthesis of Diamond Using RF Magnetron Methanol Plasma Chemical Vapor Deposition Assisted by Hydrogen Radical Injection
- Effect of Rare Gas Dilution on CH_3 Radical Density in RF-Discharge CH_4 Plasma
- Measurement of Carbon Atom Density in High Density Plasma Process