NAHM KEE | School of Chemical Engineering and Technology, Chonbuk National University
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概要
School of Chemical Engineering and Technology, Chonbuk National University | 論文
- Reactive Ion Beam Etching of In-Containing Compound Semiconductors in an Inductively Coupled Cl_2/Ar Plasma
- Reactive Ion Beam Etching of In-Containing Compound Semiconductors in an Inductively Coupled Cl2/Ar Plasma