Kim Sun-Jae | Department of Advanced Materials Engineering, Sejong University
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概要
Department of Advanced Materials Engineering, Sejong University | 論文
- Effect of Catalytic Layer Thickness on Growth and Field Emission Characteristics of Carbon Nanotubes Synthesized at Low Temperatures Using Thermal Chemical Vapor Deposition
- Effect of Ion Bombardment on Microstructures of Carbon Nanotubes Grown by Electron Cyclotron Resonance Chemical Vapor Deposition at Low Temperatures
- Control-free Air Vent System for Ultra-low Volume Sample Injection on a Microfabricated Device
- Effect of N_2O to C_4F_8/O_2 on Global Warming during Silicon Nitride Plasma Enhanced Chemical Vapor Deposition (PECVD) Chamber Cleaning Using a Remote Inductively Coupled Plasma Source : Nuclear Science, Plasmas, and Electric Discharges
- C_4F_8O/O_2/N-based Additive Gases for Silicon Nitride Plasma Enhanced Chemical Vapor Deposition Chamber Cleaning with Low Global Warming Potentials