Nagai Shuichi | Department of Electronics, Information and Communication Engineering, School of Science and Engineering, Waseda University
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概要
- 同名の論文著者
- Department of Electronics, Information and Communication Engineering, School of Science and Engineering, Waseda Universityの論文著者
Department of Electronics, Information and Communication Engineering, School of Science and Engineering, Waseda University | 論文
- Influence of Secondary Electron Detection Efficiency on Controllability of Dopant Ion Number in Single Ion Implantation
- Improvement of Focused Ion-Beam Optics in Single-Ion Implantation for Higher Aiming Precision of One-by-One Doping of Impurity Atoms into Nano-Scale Semiconductor Devices : Instrumentation, Measurement, and Fabrication Technology